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Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing

✍ Scribed by David C. Miller; Cari F. Herrmann; Hans J. Maier; Steve M. George; Conrad R. Stoldt; Ken Gall


Book ID
113895377
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
444 KB
Volume
52
Category
Article
ISSN
1359-6462

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