Interstitial trapping in Fe-implanted Al after excimer laser annealing

✍ Scribed by M.L. Swanson; L.M. Howe; A.F. Quenneville; J.A. Nilson

• Book ID: 103581188
• Publisher: Elsevier Science
• Year: 1983
• Weight: 331 KB
• Volume: 218
• Category: Article
• ISSN: 0167-5087
• DOI: 10.1016/0167-5087(83)91057-8