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Interpretation of IR spectra of ultrathin films on metals

โœ Scribed by G. N. Kuznetsova; V. P. Tolstoi

Publisher
Springer US
Year
1977
Tongue
English
Weight
261 KB
Volume
27
Category
Article
ISSN
0021-9037

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Ultrathin metallic films like CoFe, Ta, Cu, Cr, and NiFe are widely used in magnetic devices such as magnetic random access memory (MRAM) and magnetic recording heads. Dewetting corrosions were often observed after O 2 plasma ashing in MRAM fabrications. The surface stability of these films was then