A competitive (2+1)-dimensional model of deposit formation, based on the combination of random sequential absorption deposition (RSAD), ballistic deposition (BD) and random deposition (RD) models, is proposed. This model was named as RSAD1-s(RD f BD 1-f )s. It allows to consider di erent cases of interparticle interactions from complete repulsion between near-neighbors in the RSAD model (s = 0) to sticking interactions in the BD model (s =1; f =0) or absence of interactions in the RD model (s=1; f=0). The ideal checkerboard-ordered structure was observed for the pure RSAD model (s = 0) in the limit of h โ โ. Defects in the ordered structure were observed at small h. The density of deposit p versus system size L dependencies were investigated and the scaling parameters and values of pโ =p(L=โ) were determined. Dependencies of p versus parameters of the competitive model s and f were studied. We observed the anomalous behavior of the deposit density pโ with change of the interparticle repulsion, which goes through minimum on change of the parameter s. For pure RSAD model, the concentration of defects decreases with h increase in accordance with the critical law หh-RSAD , where RSAD โ 0:119 ยฑ 0:04.