Process integration issues in thin-film
Process integration issues in thin-film photovoltaics and their impact on future research directions
โ
Peter Sheldon
๐
Article
๐
2000
๐
John Wiley and Sons
๐
English
โ 368 KB
๐ 2 views
Thin-ยฎlm device processing relies heavily on the integration of a variety of materials and a wide array of process steps. These include in some instances, the integration of `wet' (chemical etching) and `dry' (deposition and plasma etching) process steps. As substrates are stepped through the proces