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Internal structure transition of spin-on glass by electron beam irradiation

✍ Scribed by Makoto Araki; Jun Taniguchi; Nobuo Sawada; Takayuki Utsumi; Iwao Miyamoto

Book ID: 103818592
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 407 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.09.071

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