Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser

✍ Scribed by Wachulak, P.; Grisham, M.; Heinbuch, S.; Martz, D.; Rockward, W.; Hill, D.; Rocca, J. J.; Menoni, C. S.; Anderson, E.; Marconi, M.

• Book ID: 115398719
• Publisher: Optical Society of America
• Year: 2008
• Tongue: English
• Weight: 280 KB
• Volume: 25
• Category: Article
• ISSN: 0740-3224
• DOI: 10.1364/JOSAB.25.00B104