✦ LIBER ✦
Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
✍ Scribed by Roy, S; Kumar, N; Pereira, S F; Urbach, H P
- Book ID
- 120572232
- Publisher
- Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 617 KB
- Volume
- 15
- Category
- Article
- ISSN
- 2040-8978
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