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Interferometric analysis of nanostructured surface profiles: correcting material-dependent phase shifts

✍ Scribed by Yatsenko, Leonid P. ;Loeffler, Matthias ;Shore, Bruce W. ;Bergmann, Klaas


Book ID
115351488
Publisher
The Optical Society
Year
2004
Tongue
English
Weight
810 KB
Volume
43
Category
Article
ISSN
1559-128X

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