✦ LIBER ✦
Interfacing a source utilizing low perveance ion beam extraction to a beam transport system suitable for ion implantation : D. J. T. Mayhall and W. P. Robinson. Solid State Tech. 40 (1974)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 99 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0026-2714
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