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Interfacial silicon oxide formation during synthesis of ZrO2 on Si(100)

โœ Scribed by Y.-M Sun; J Lozano; H Ho; H.J Park; S Veldman; J.M White


Book ID
104309166
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
288 KB
Volume
161
Category
Article
ISSN
0169-4332

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