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Interfacial reactions of W thin film on single-crystal (001) β-SiC

✍ Scribed by L. Baud; C. Jaussaud; R. Madar; C. Bernard; J.S. Chen; M.A. Nicolet


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
373 KB
Volume
29
Category
Article
ISSN
0921-5107

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