✦ LIBER ✦
Interfacial layer dependence on device property of high-κ TiLaO Ge/Si N-type metal-oxide-semiconductor capacitors at small equivalent-oxide thickness
✍ Scribed by W. B. Chen; A. Chin
- Book ID
- 123616067
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 507 KB
- Volume
- 95
- Category
- Article
- ISSN
- 0003-6951
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