Interfacial stability between zirconium
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Ninglin Zhang; Zhitang Song; Su Xing; Qinwo Shen; Chenglu Lin
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Article
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2003
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Elsevier Science
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English
โ 228 KB
We studied the interfacial properties of ZrO thin films deposited by ultra-high vacuum electron beam 2 evaporation (UHV-EBE). Some samples were annealed in O ambient by rapid thermal annealing (RTA) at 2 different temperatures ranging from 300 to 700 8C. X-ray photoelectron spectroscopy (XPS) of all