Interfacial fracture for TiN/SiNx nano-multilayer coatings on Si(1 1 1) characterized by nanoindentation experiments

✍ Scribed by T. An; M. Wen; C.Q. Hu; H.W. Tian; W.T. Zheng

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 801 KB
• Volume: 494
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/j.msea.2008.04.020