Interfacial failure under thermal fatigue loading in multilayered MEMS structures

✍ Scribed by Maligno, A R; Whalley, D; Silberschmidt, V V

• Book ID: 119958512
• Publisher: IOP Publishing
• Year: 2010
• Weight: 663 KB
• Volume: 10
• Category: Article
• ISSN: 1757-8981
• DOI: 10.1088/1757-899X/10/1/012087