✦ LIBER ✦
Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
✍ Scribed by Vipin Chawla; David Holec; Paul H. Mayrhofer
- Book ID
- 116376160
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 769 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0927-0256
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