✦ LIBER ✦
Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers
✍ Scribed by B. Claflin
- Book ID
- 121813602
- Publisher
- AVS (American Vacuum Society)
- Year
- 1998
- Tongue
- English
- Weight
- 296 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.581297
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