✦ LIBER ✦
Interface stability and microstructure of an ultrathin α-Ta/graded Ta(N)/TaN multilayer diffusion barrier
✍ Scribed by C.H. Liu; W. Liu; Y.H. Wang; Y. Wang; Z. An; Z.X. Song; K.W. Xu
- Book ID
- 116741943
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 949 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0167-9317
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