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Interface diffusion and chemical reaction of PZT layer/Si (111) sample during the annealing treatment in air

โœ Scribed by Zhu Yong-Fa; Yan Pei-Yu; Yi Tao; Cao Li-Li; Li Long-Tu


Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
463 KB
Volume
18
Category
Article
ISSN
0256-7660

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Interface diffusion and chemical reactio
โœ Zhu, Yongfa; Yan, Peiyu; Yi, Tao; Cao, Lili; Li, Longtu ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 148 KB ๐Ÿ‘ 2 views

Interface diffusion and chemical reaction between a lead zirconate titanate (PZT) layer and an Si substrate during annealing treatment in N 2 or in a vacuum were studied using AES depth profile and lineshape analysis techniques. The results indicated that annealing treatment in a high vacuum was abl