Interface diffusion and chemical reactio
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Zhu, Yongfa; Yan, Peiyu; Yi, Tao; Cao, Lili; Li, Longtu
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Article
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1999
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John Wiley and Sons
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English
โ 148 KB
๐ 2 views
Interface diffusion and chemical reaction between a lead zirconate titanate (PZT) layer and an Si substrate during annealing treatment in N 2 or in a vacuum were studied using AES depth profile and lineshape analysis techniques. The results indicated that annealing treatment in a high vacuum was abl