Interface control in the chemical vapor deposition of titanium dioxide on silicon(100)

✍ Scribed by Allan Tuan; Meeyoung Yoon; Valentin Medvedev; Yoshi Ono; Yanjun Ma; J.W Rogers Jr.

• Book ID: 114085346
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 187 KB
• Volume: 377-378
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(00)01453-x