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Interdiffusion and reactions in the Cu/TiN/Si thin film system

✍ Scribed by Y.S. Gong; Jing-Cheng Lin; Chiapyng Lee

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 308 KB
Volume: 92
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00251-0

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