An investigation of the behavior of bare, unprocessed silicon wafers during their loading and transport in wafer cassettes is documented. Semiconductor process tools can generate sufficient vibration to cause the current 200-mm diameter wafers to vibrate inside the cassettes leading to particle gene
✦ LIBER ✦
Interactive tool in silicon semiconductor modeling: SSMod
✍ Scribed by Valentín Loyo-Maldonado; René De J. Romero-Troncoso
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 197 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1061-3773
No coin nor oath required. For personal study only.
✦ Synopsis
In this article the development of an interactive tool for silicon semiconductor modeling is described. This tool includes four physical phenomena, two passive devices, and two active devices. We encourage the use of this tool in electronic physics lectures to help in the complete understanding of this phenomena and the associated devices.
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