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Interaction of structure with kinetics in Si(001) homoepitaxy

✍ Scribed by S. Clarke; M.R. Wilby; D.D. Vvedensky; T. Kawamura

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 490 KB
Volume: 183
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90447-1

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