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Interaction of Silicon Nitride and Metal Surfaces

✍ Scribed by Gerald J. Tennenhouse; Andre Ezis; Frankling D. Runkle

Book ID
110823043
Publisher
John Wiley and Sons
Year
1985
Tongue
English
Weight
604 KB
Volume
68
Category
Article
ISSN
0002-7820

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Silicon and silicon nitride surfaces have been successfully terminated with carboxylic acid monolayers and investigated by atomic force microscopy (AFM) and scanning near-field optical microscopy (SNOM). On clean Si surface, AFM showed topographical variations of 0.3-0.4 nm while for the clean Si 3