Interaction of 157-nm excimer laser radiation with fluorocarbon polymers

✍ Scribed by Sharon R. George; John A. Leraas; Stephen C. Langford; J.T. Dickinson

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 241 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.04.090