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Interaction between the electromagnetic fields and the plasma in a microwave plasma reactor

โœ Scribed by Hagelaar, G. J. M.; Hassouni, K.; Gicquel, A.


Book ID
120528901
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
997 KB
Volume
96
Category
Article
ISSN
0021-8979

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