Integrity of copper–hafnium, hafnium nitride and multilayered amorphous-like hafnium nitride metallization under various thickness

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• Book ID: 104050417
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 475 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.09.008