Integration of wear-resistant titanium carbide coatings into MEMS fabrication processes

✍ Scribed by G. Radhakrishnan; P.M. Adams; R. Robertson; R. Cole

• Book ID: 110386193
• Publisher: Springer US
• Year: 2000
• Tongue: English
• Weight: 78 KB
• Volume: 8
• Category: Article
• ISSN: 1023-8883
• DOI: 10.1023/a:1019179000420