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Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

✍ Scribed by Yugma, Claude; Blue, Jakey; Dauzère-Pérès, Stéphane; Obeid, Ali

Book ID: 125364375
Publisher: Springer US
Year: 2014
Tongue: English
Weight: 472 KB
Volume: 18
Category: Article
ISSN: 1094-6136
DOI: 10.1007/s10951-014-0381-1

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