✦ LIBER ✦
Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography
✍ Scribed by Haatainen, T.; Mäkelä, T.; Schleunitz, A.; Grenci, G.; Tormen, M.
- Book ID
- 123515116
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 625 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0167-9317
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