✦ LIBER ✦
Integration of MOCVD titanium nitride with collimated titanium and ion metal plasma titanium for 0.18-μm logic process
✍ Scribed by J.K Lan; Y.L Wang; K.Y Lo; C.P Liu; C.W Liu; J.K Wang; Y.L Cheng; C.G Chau
- Book ID
- 117226594
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 623 KB
- Volume
- 398-399
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.