✦ LIBER ✦

Integration of HSQ in the direct-on-metal approach for 0.25-μm technology

✍ Scribed by T Gao; A Witvrouw; B Coenegrachts; C Bruynseraede; M Van Hove; K Maex

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 918 KB
Volume: 50
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(99)00302-0

No coin nor oath required. For personal study only.

✦ Synopsis

The spin-on low-k material coated directly on the metal lines, which is called the direct-on-metal (DOM) approach, has been investigated with respect to issues about the intraline capacitance, the intraline leakage current, metal corrosion, unlanded vias, and electromigration lifetime. The results indicate that DOM can be successfully integrated with less process steps and better performance.

📜 SIMILAR VOLUMES

On the use of the pulsed-convection appr

On the use of the pulsed-convection approach for modelling advection-diffusion in chaotic flows—A prototypical example and direct numerical simulations

✍ M. Giona; A. Adrover; S. Cerbelli 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 494 KB

This article addresses the application of pulsed system models (in which the advection operator is decoupled from the diffusion operator) for investigating the physics of dispersion/ homogenization in deterministic chaotic flows. The analysis is organized along to main directions: (i) the developmen