Integration Benefits of Carborane Molecular Implant for State-of-the-Art 28-nm Logic pFET Device Manufacturing

✍ Scribed by Li, C. I.; Shen, T. M.; Kuo, P.; Liu, R.; Chan, M.; Yang, C. L.; Wu, J. Y.; Colombeau, B.; Guo, B. N.; Thanigaivelan, T.; Toh, T.; Sun, H. L.; Wu, T.; Lu, S.

• Book ID: 120354257
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 472 KB
• Volume: 32
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2011.2105855