✦ LIBER ✦
Integrating process and novel sacrificial layer fabricating technique based on diluted SU-8 resist
✍ Scribed by Jun Zhu; Ying Cao; Yigui Li; Xiang Chen; Di Chen
- Book ID
- 113797941
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 764 KB
- Volume
- 93
- Category
- Article
- ISSN
- 0167-9317
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