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Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers

✍ Scribed by Hayamizu, Yuhei; Yamada, Takeo; Mizuno, Kohei; Davis, Robert C.; Futaba, Don N.; Yumura, Motoo; Hata, Kenji


Book ID
109941881
Publisher
Nature Publishing Group
Year
2008
Tongue
English
Weight
830 KB
Volume
3
Category
Article
ISSN
1748-3387

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