Polymer microoptoelectromechanical syste
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V.J. Cadarso; A. Llobera; G. Villanueva; V. Seidemann; S. BΓΌttgenbach; J.A. Plaz
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Article
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2008
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Elsevier Science
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English
β 810 KB
This paper presents the design, fabrication and characterization of polymer microoptoelectromechanical systems (MOEMS). An optical accelerometer and a variable optical attenuator (VOA) based on SU-8 are presented. Both devices consist on a quad-beam polymer structure and can be fabricated with a sim