✦ LIBER ✦
Integrated optical interferometric detection method for micromachined capacitive acoustic transducers
✍ Scribed by Hall, Neal A.; Degertekin, F. Levent
- Book ID
- 121809182
- Publisher
- American Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 370 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0003-6951
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