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Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

✍ Scribed by Van Campenhout, Joris; Green, William M. J.; Assefa, Solomon; Vlasov, Yurii A.

Book ID: 115433007
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 353 KB
Volume: 35
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.35.001013

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