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Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide

โœ Scribed by So V. Pham; Meindert Dijkstra; Henk A. G. M. van Wolferen; Markus Pollnau; Gijs J. M. Krijnen; Hugo J. W. M. Hoekstra

Book ID
115435086
Publisher
Optical Society of America
Year
2011
Tongue
English
Weight
393 KB
Volume
36
Category
Article
ISSN
0146-9592

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