Integrated diffusion–recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials

✍ Scribed by E. Kunnen; G.T. Barkema; C. Maes; D. Shamiryan; A. Urbanowicz; H. Struyf; M.R. Baklanov

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 483 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2010.07.014