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Instrumented indentation testing for local characterisation of polymer properties after nanoimprint

✍ Scribed by G.L.W. Cross; B.S. O’Connell; J.B. Pethica; H. Schulz; H.-C. Scheer

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
428 KB
Volume
78-79
Category
Article
ISSN
0167-9317

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✦ Synopsis

The mechanical state of polymer flows induced by wide area thermal nanoimprint was investigated using instrumented indentation testing. Polystyrene films of narrow distribution molecular weight both slightly above and well above the chain entanglement weight spacing were imprinted with a range of feature shapes under nominally equivalent flow conditions. Following imprint, pristine, unflowed, and flowed regions of the polymer were tested for indentation modulus and hardness using sharp pyramidal and blunt spherical indenters. No difference in mechanical state for these various regions was observed. The implications of these results for the imprint process itself as well as the mechanical testing of imprinted patterns are discussed.

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