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InP substrate temperature measurements in a horizontal, low-pressure metalorganic chemical vapor deposition reactor by infrared laser interferometric thermometry

✍ Scribed by V.R. McCrary; V.M. Donnelly; S.G. Napholtz; T.R. Hayes; P.S. Davisson; D.C. Bruno


Book ID
107791971
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
721 KB
Volume
125
Category
Article
ISSN
0022-0248

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