InP MIS structures with diamondlike amorphous carbon films deposited by ion-beam sputtering and from plasma

✍ Scribed by Jae E. Oh; Joel D. Lamb; Paul G. Snyder; John A. Woollam; David C. Liu

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 631 KB
• Volume: 29
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(86)90017-1