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Initial stages of microcrystalline silicon film growth

✍ Scribed by S. Koynov; S. Grebner; P. Radojkovic; E. Hartmann; R. Schwarz; L. Vasilev; R. Krankenhagen; I. Sieber; W. Henrion; M. Schmidt


Book ID
115991185
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
396 KB
Volume
198-200
Category
Article
ISSN
0022-3093

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