Initial performance results from the NV1002 high energy ion implanter

✍ Scribed by E. McIntyre; D. Balek; P. Boisseau; A. Dart; A.S. Denholm; H. Glavish; C. Hayden; L. Kaminski; B. Libby; N. Meyyappan; J. O'Brien; F. Sinclair; K. Whaley

• Book ID: 113282428
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 512 KB
• Volume: 55
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(91)96215-7