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Initial oxidation process by ozone on Si(1 0 0) investigated by scanning tunneling microscopy

✍ Scribed by Hiroshi Itoh; Ken Nakamura; Akira Kurokawa; Shingo Ichimura

No coin nor oath required. For personal study only.

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Initial oxidation process by ozone on Si(1&#xa0;0&#xa0;0) investigated by scanning tunneling microscopy