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Initial Energy Distribution of Sputtered Atoms in DC Diode Systems

โœ Scribed by Czekaj, D. ;Hollmann, E. K. ;Kozirev, A. B. ;Volpyas, V. A. ;Zaitsev, A. G.


Book ID
105381416
Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
165 KB
Volume
114
Category
Article
ISSN
0031-8965

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