Infrared total internal reflection spectroscopy of dimethylcadmium on chemically passivated silicon surfaces
✍ Scribed by Esaul Sanchez; Ping S. Shaw; James A. O'neill; Richard M. Osgood Jr.
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 729 KB
- Volume
- 147
- Category
- Article
- ISSN
- 0009-2614
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✦ Synopsis
The chemistry of dimethylcadmium (DMCd) on chemically passivated silicon surfaces is monitored through changes in the infrared spectra of the CH vibrational modes in both chemically and physically adsorbed molecules. Total internal reflection of the IR probe beam was employed to isolate the surface-molecule signal from that due to ambient gas-phase molecules. Excimer laser irradiation of the adsorbed DMCd at 248 nm under conditions appropriate for Cd film deposition resulted in changes in the observed spectra which indicate a high hydrocarbon content in the deposited metal layer,