✦ LIBER ✦
Infrared sub-band-gap photocurrent imaging in the scanning optical microscope of defects in semiconductor devices
✍ Scribed by D.K. Hamilton; T. Wilson
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 474 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0739-6260
No coin nor oath required. For personal study only.
✦ Synopsis
An optical beam induced contrast (OBIC) image of a gallium phosphide light emitting diode, produced using radiation of quantum energy less than the material's enery gap, shows sub-surface crystallographic defects which are not imaged with conventional OBIC. These defects show strong correspondence with a region of low intensity emission from the diode.